Homogeneously Size Distributed Ge Nanoclusters Embedded in SiO₂ Layers Produced by Ion Beam Synthesis

Homogeneously Size Distributed Ge Nanoclusters Embedded in SiO₂ Layers Produced by Ion Beam Synthesis

Markwitz, A.; Rebohle, L.; Skorupa, W.; Hofmeister, H.

• Nuclear Instruments and Methods in Physics Research B 147 (1999) 361-366
  DOI: 10.1016/S0168-583X(98)00542-4
  Cited 33 times in Scopus
• Lecture (Conference)
  E-MRS ´98, Strasbourg, June 16 - 19, 1998

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