Comment on "Gettering of Cu by He-Induced Cavities in SIMOX Materials

Comment on "Gettering of Cu by He-Induced Cavities in SIMOX Materials

Yankov, R. A.; Skorupa, W.

• Nuclear Instruments and Methods in Physics Research B 149 (1999) 445
  DOI: 10.1016/S0168-583X(98)00970-7

Permalink: https://www.hzdr.de/publications/Publ-1188