Alloy Liquid Metal Ion Sources for new FIB applications

Recently, mass separated focused ion beams (FIB) become an increasing interest for local doping in nano-devices for optical, electrical or magnetic applications [1]. So on the basis of very stable metallic glass alloys, like AuSi or AuGe with a low melting point at 365°C different ion sources were developed and tested due to their performance in FIB systems. In detail, Au68Ge22B5Ni5, Au80Si12Sb8, Au68Ge28Mn10 alloys were analysed concerning the on-set and emission behaviour and the mass spectra. Among clusters, molecular ions, single and doubly charged species such important ions like boron for p-doping in silicon, antimony for n-doping in silicon or manganese for quantum dot fabrication in II-VI semiconductors (CdSe, CdS, ZnS) could be extracted.
[1] L. Bischoff, NIM B266 (2008) 1846.