In-situ grazing incidence scattering investigations during magnetron sputtering deposition of FePt/Ag thin films

Using synchrotron in-situ X-ray diffraction and grazing incidence small angle scattering, we studied the growth of FePt islands incorporated into a Ag matrix. The deposition, by dual DC magnetron sputtering on amorphous Si/SiO2 substrate, was carried out at 400°C to support the formation of the hard ferromagnetic L10-FePt phase during growth. Thin Ag interspacing layers provide a granular FePt film but, by depositing 6 nm Ag layer directly on the SiO2 substrate, we obtained well defined FePt clusters. FePt nanoislands have been achieved without degradation of the magnetic properties. We obtained a magnetic asymmetry with magnetic moments preferentially oriented parallel to the layer surface.