Scanning proximal probes for parallel imaging and lithography

Ivanova, K.; Sarov, Y.; Ivanov, T.; Frank, A.; Zöllner, J.; Bitterlich, C.; Wenzel, U.; Volland, B. E.; Klett, S.; Rangelowa, I. W.; Zawierucha, P.; Zielony, M.; Gotszalk, T.; Dontzov, D.; Schott, W.; Nikolov, N.; Zier, M.; Schmidt, B.; Engl, W.; Sulzbach, T.; Kostic, I.

doi:10.1116/1.2990789

Scanning proximal probes for parallel imaging and lithography

Ivanova, K.; Sarov, Y.; Ivanov, T.; Frank, A.; Zöllner, J.; Bitterlich, C.; Wenzel, U.; Volland, B. E.; Klett, S.; Rangelowa, I. W.; Zawierucha, P.; Zielony, M.; Gotszalk, T.; Dontzov, D.; Schott, W.; Nikolov, N.; Zier, M.; Schmidt, B.; Engl, W.; Sulzbach, T.; Kostic, I.

Scanning proximity probes are uniquely powerful tools for analysis, manipulation, and bottom-up synthesis. A massively parallel cantilever-probe platform is demonstrated. 128 self-sensing and self-actuated proximal probes are discussed. Readout based on piezoresistive sensors and bending control based on bimorph dc/ac actuations are described in detail.

Keywords: Scanning proximity probes; piezoresistive sensing; bimorph actuations; parallel cantilever-probe platform

Journal of Vacuum Science & Technology B 26(2008)6, 2367-2373
DOI: 10.1116/1.2990789
Cited 49 times in Scopus

Permalink: https://www.hzdr.de/publications/Publ-12177