Spontaneous formation of regular nanopattern on surfaces during thin film deposion and ion beam erosion

Spontaneous formation of regular nanopattern on surfaces during thin film deposion and ion beam erosion

Heinig, K.-H.

Ion erosion of surface results under specific conditions to formation of dot-like or ripple-like nanopattern. These self-organized nanopattern are promising for different nanotechnologies. The presentation gives an overview of experimental techniques and results as well theoretical models and simulation work.

Keywords: ion erosion; nanopattern; experiments; theory; kinteic Monte Carlo simulations

  • Invited lecture (Conferences)
    Winter School on Nanoelectronic and Nanophotonics, 19.-25.01.2009, Ankara, Turkey

Permalink: https://www.hzdr.de/publications/Publ-12197