Crystallization and Surface Erosion of SiC by Ion Irradiation at Elevated Temperatures

Crystallization and Surface Erosion of SiC by Ion Irradiation at Elevated Temperatures

Heera, V.; Stoemenos, J.; Kögler, R.; Voelskow, M.; Skorupa, W.

• Journal of Applied Physics 85 (1999) 1378
  DOI: 10.1063/1.369333
  Cited 27 times in Scopus
• Lecture (Conference)
  ECSCRM '98 (2nd European Conf. on Silicon Carbide and Related Materials), Montpellier, Sept. 2 - 4, 1998

Permalink: https://www.hzdr.de/publications/Publ-1250