Ion-beam-assisted nanostructure formation – atomistic reaction pathways

This presentation highlights the role of ion beams for the formation of nanostructures. The focus is on the selforganization of regular surface pattern under low-energy ion irradiation and on the self-patterning of metal deposits on prepatterned silica surfaces. It will be shown that a deep understanding about the atomistic mechanisms involved can be gained from a combination of collision cascade simulations with 3D kinetic Monte-Carlo calculations.