Capabilities and limitations of spectroscopic ellipsometry for characterization of functional thin films
Capabilities and limitations of spectroscopic ellipsometry for characterization of functional thin films
Vinnichenko, M.
An overview of different configurations of spectroscopic ellipsometers was given. The approaches for data acquisition and analysis in case of high refractive index materials and transparent conductive oxides were discussed.
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Lecture (others)
Invited lecture during visit to "Next Energy" EWE-Forschungszentrum für Energietechnologie e.V., 10.-11.02.2010, Oldenburg, Germany
Permalink: https://www.hzdr.de/publications/Publ-14202
