n-InAs nanopyramids fully integrated into silicon
n-InAs nanopyramids fully integrated into silicon
Prucnal, S.; Facsko, S.; Baumgart, C.; Schmidt, H.; Liedke, M. O.; Rebohle, L.; Shalimov, A.; Reuther, H.; Kanjilal, A.; Mücklich, A.; Helm, M.; Zuk, J.; Skorupa, W.
InAs with an extremely high electron mobility (up to 40000 cm2/Vs) seems to be the most suitable candidate for better electronic devices performance. Here we present synthesis of inverted crystalline InAs nanopyramids (NPs) in silicon using a combined hot ion implantation and millisecond flash lamp annealing techniques. Conventional selective etching was used to form the InAs/Si heterojunction. The current-voltage measurement confirms the heterojunction diode formation with the ideality factor of n=4.6. Kelvin Probe Force Microscopy measurements indicate a type-II band alignment of n-type InAs NPs on p-type silicon. The main advantage of our method is its integration with large-scale silicon technology, which also allows applying it for Si-based electronic devices.
Keywords: heterojunction; flash lamp annealing; InAs; heteronanowires; silicon
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
- Rossendorf Beamline at ESRF DOI: 10.1107/S1600577520014265
Related publications
- DOI: 10.1107/S1600577520014265 is cited by this (Id 15743) publication
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 15743) publication
-
Nano Letters 11(2011)7, 2814-2818
DOI: 10.1021/nl201178d
Cited 22 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-15743