Use of plasma treatment to grow carbon nanotube forests on TiN substrate
Use of plasma treatment to grow carbon nanotube forests on TiN substrate
Esconjauregui, S.; Bayer, B.; Fouquet, M.; Wirth, C.; Yan, F.; Xie, R.; Ducati, C.; Baehtz, C.; Castellarin-Cudia, C.; Bhardwaj, S.; Cepek, C.; Hofmann, S.; Robertson, J.
Hydrogen plasma pretreatment is used to enforce the growth of vertically-aligned carbon nanotube forests on TiN substrates. The evolution of the substrate, catalyst, and nanotubes are studied by in situ and ex-situ photoemission and X-ray diffraction in order to understand the growth mechanism. We find that TiN retains its crystallographic structure and its conductivity during plasma pretreatment and nanotube growth, which is confirmed by electrical measurements. Plasma pretreatment is found to favor the growth of nanotube forests by root growth, as it binds the catalyst nanoparticles more strongly to the substrate than thermal pretreatment. We find that plasma pretreatment time should be limited, otherwise poor or no growth is found.
Keywords: CHEMICAL-VAPOR-DEPOSITION; RAY PHOTOELECTRON-SPECTROSCOPY; TITANIUM; MULTILAYERS; METAL; FILMS
Involved research facilities
- Rossendorf Beamline at ESRF DOI: 10.1107/S1600577520014265
Related publications
- DOI: 10.1107/S1600577520014265 is cited by this (Id 15849) publication
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Journal of Applied Physics 109(2011)11, 1143121-1143131
DOI: 10.1063/1.3587234
ISSN: 0021-8979
Cited 35 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-15849