Nano-structure analysis of Fe implanted SnO₂ films by ⁵⁷Fe and ¹¹⁹Sn CEMS

SnO₂ films were implanted with ⁵⁷Fe at substrate temperatures of room temperature and 300°C. The chemical states of Fe and Sn were characterized by ⁵⁷Fe CEMS and ¹¹⁹Sn CEMS, respectively. The implanted Fe species exist as Fe(II) and Fe(III) in SnO₂ films, which also are reduced into Sn(II)on the implanted surface. The as prepared and post annealed at 500°C samples did not show Kerr effect, but the sample implanted with 1 × 10¹⁷ Fe ions/cm² at 300°C showed Kerr effect although magnetic sextets were not clearly observed in the ⁵⁷Fe CEM spectra. The Kerr effect disappeared after annealing. It suggests that the number of magnetic defects decreases by absorption of oxygen. Magnetic relaxation appeared in the case of low implantation of 5 × 10¹⁶ Fe ions/cm², which is considered to be due to antiferromagnetism or paramagnetic relaxation.