Structure and electrical properties of transparent conductive doped ZnO grown by reactive magnetron sputtering
Structure and electrical properties of transparent conductive doped ZnO grown by reactive magnetron sputtering
Cornelius, S.; Vinnichenko, M.; Munnik, F.; Heller, R.; Kolitsch, A.; Möller, W.
No abstract available.
Keywords: Al-doped ZnO; transparent conductive oxide; zinc oxide; magnetron sputtering; doping; activation
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 16510) publication
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Invited lecture (Conferences)
IOP Workshop "Plasmas, Surfaces and Thin Films", 08.06.2011, London, England
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