Nano structure induced by ion beam sputtering
Nano structure induced by ion beam sputtering
Ou, X.; Grenzer, J.; Facsko, S.
Horizontal silicon nanowires arrays on insulator fabricated by ion irradiation and Nano-dot and nano-hole pattern on Si generated by metal incorporation during the ion beam sputtering
Keywords: irradiation; nanopatterning
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 18272) publication
-
Lecture (others)
Forschergruppe 845 project workshop, 07.-08.02.2012, Kaiserslautern, Germany
Permalink: https://www.hzdr.de/publications/Publ-18272
