Silicon Films with Gallium Rich Nanograins - from Superconductor to Insulator

Si films sputter deposited on SiO₂ substrates are enriched with Ga by ion implantation through a capping SiO₂ layer. The morphology and the electrical transport properties of these films are investigated after rapid thermal annealing. Amorphous, Ga rich nanograins are embedded in a nanocrystalline Si matrix. The nanograins are metallic in the normal state and superconducting below 7 K. They form a random network of junctions to heavily doped Si crystallites. Small modifications of the junction properties, e.g. by annealing or current pulses, can dramatically change the electronic transport in the film. Ga rich Si films show a wealth of low-temperature transport phenomena which have been known until now only from granular metals or high temperature superconductors: superconductor-insulator transition, quasi-reentrant superconductivity and current controlled sheet resistance. The possibility to fabricate and tailor films of Ga rich Si with microelectronics compatible technology make it a promising material for the integration of superconducting circuits into Si devices.