Historical Aspects of Subsecond Thermal Processing
Historical Aspects of Subsecond Thermal Processing
Voelskow, M.; Yankov, R. A.; Skorupa, W.
From atom bomb simulation to advanced semiconductor processing - what a bellicose - to peaceful bottom - up approach this research field experienced
Keywords: historical aspects; subsecond thermal processing
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 19748) publication
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Book chapter
Wolfgang Skorupa, Heidemarie Schmidt: Subsecond Annealing of Advanced Materials: Annealing by Lasers, Flash Lamps and Swift Heavy Ions (Springer Series in Materials Science), Switzerland: Springer, 2014, 978-3-319-03130-9, 1-13
DOI: 10.1007/978-3-319-03131-6_1
Cited 5 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-19748
