The Ion Beam Center at the HZDR, nanocomposite growth with ions, and cluster tool setting up

The talk will first emphasize the role of the Ion Beam Center as large scale facility within our research center. Recent results of ion-assisted growth of carbon:metal nanocomposite thin films will be shown in the second part. In the third part of the talk the concept and the current state of the setting up of the cluster tool at the Ion Beam Center will be presented. Examples for possible in situ experiments are given. They include the layer exchange in carbon: nickel double layers, the growth mechanism of carbon on metals at different temperatures, the thermal stability and graphitization of carbon: metal films, and the graphitization of carbon implanted in metals.