A novel setup for spectroscopic ellipsometry using an acousto-optic tuneable filter

A novel setup for spectroscopic ellipsometry using an acousto-optic tuneable filter

Fukarek, W.; von Keudell, A.

• Review of Scientific Instruments 66 (1995) 6, pp. 3545-3550 (zum Patent angemeldet am 20.12.93)
  DOI: 10.1063/1.1145466
  Cited 11 times in Scopus

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