The interplay of sputtering and oxidation during plasma diffusion treatment
The interplay of sputtering and oxidation during plasma diffusion treatment
Parascandola, S.; Kruse, O.; Möller, W.
Metals that form dense native surface oxide layers challenge plasma diffusion treatment techniques. Experimental results obtained during nitriding of stainless steel from real-time depth-resolved compositional analysis by elastic recoil detection give insight into the transport kinetics. In agreement with semi-quantitative considerations on the oxide removal and the oxide growth, the interplay of sputtering and oxidation emerges as a key parameter. On this background, suggestions for practical applications and optimization of the modification processes are given for different plasma diffusion treatment techniques.
- Applied Physics Letters 75 (1999) No. 13, 1851-1853
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