Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA

Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA

Behrisch, R.; Grigull, S.; Kreißig, U.; Grötzschel, R.

• Nucl. Instr. Meth. B 136-138 (1998) 628

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