Nucleation and growth of platelet bubble structures in helium implanted silicon

Fichtner, P.; Kaschny, J. R.; Kling, A.; Trinkaus, H.; Yankov, R. A.; Mücklich, A.; Skorupa, W.; Zawislak, F. C.; Amaral, L.; Da Silva, M. F.; Soares, J. C.

Nucleation and growth of platelet bubble structures in helium implanted silicon

Fichtner, P.; Kaschny, J. R.; Kling, A.; Trinkaus, H.; Yankov, R. A.; Mücklich, A.; Skorupa, W.; Zawislak, F. C.; Amaral, L.; Da Silva, M. F.; Soares, J. C.

Nucl. Instr. Meth. B 136 - 138 (1998) 460

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