Depth analysis of Fe-silicide formation after Fe-implantation into Si by DCEMS

Depth analysis of Fe-silicide formation after Fe-implantation into Si by DCEMS

Kruijer, S.; Dobler, M.; Reuther, H.; Keune, W.

• Hyperfine Interactions (C) 3 (1998) 149
• Lecture (Conference)
  Int. Conf. Appl. Mössbauer Effect, Rio de Janeiro, Sept. 14 - 20, 1997

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