Investigation of d.c.-reactive magnetron-sputtered AIN thin films by electron microprobe analysis, X-ray photoelectron spectroscopy and polarized infra-red reflection

Investigation of d.c.-reactive magnetron-sputtered AIN thin films by electron microprobe analysis, X-ray photoelectron spectroscopy and polarized infra-red reflection

Manova, D.; Dimitrova, V.; Fukarek, W.; Karpuzov, D.

• Surf. Coat. Technol. 106 (1998) 205

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