Growth, patterning and microelectronic applications of epitaxial cobaltdisilicide

Mantl, S.; Kappius, L.; Antons, A.; Löken, M.; Klinkhammer, F.; Dolle, M.; Zhao, Q. T.; Mesters, S.; Buchal, C.; Bay, H. L.; Trinkaus, H.; Heinig, Karl-Heinz

Growth, patterning and microelectronic applications of epitaxial cobaltdisilicide

Mantl, S.; Kappius, L.; Antons, A.; Löken, M.; Klinkhammer, F.; Dolle, M.; Zhao, Q. T.; Mesters, S.; Buchal, C.; Bay, H. L.; Trinkaus, H.; Heinig, K.-H.

Contribution to external collection
MRS Symp. Proc. 514 (1998) 145

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