Cross-sectional micro-Raman Spectroscopy: a tool for structural investigations of thin polytypic SiC layers

Cross-sectional micro-Raman Spectroscopy: a tool for structural investigations of thin polytypic SiC layers

Werninghaus, T.; Zahn, D.; Yankov, R. A.; Mücklich, A.; Pezoldt, J.

• Mat. Sci. Forum 264-268 (1998) 661
• Lecture (Conference)
  Int. Conf. on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, Aug. 31 - Sept. 5, 1997

Permalink: https://www.hzdr.de/publications/Publ-2191