The effects of annealing temperature on the formation of helium filled structures in silicon

Fichtner, P.; Kaschny, J. R.; Behar, M.; Yankov, R. A.; Mücklich, A.; Skorupa, W.

Lecture (Conference)
11th Int. Conf. on Ion Beam Modification of Materials (IBMM'98), Amsterdam, Aug. 31 - Sept. 4, 1998

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