Analysis of mechanisms in ECR-PECVD of BN films using in situ ellipsometry
Analysis of mechanisms in ECR-PECVD of BN films using in situ ellipsometry
Fukarek, W.; Möller, W.
-
Lecture (Conference)
DACH - Kolloquium, Giengen, Oct. 6-8, 1998
Permalink: https://www.hzdr.de/publications/Publ-2213