Si_1-xGe_x structures fabricated by focused ion beam implantation

Si_1-xGe_x structures fabricated by focused ion beam implantation

Ganetsos, T.; Tsamakis, D.; Panknin, D.; Mair, G. L. R.; Teichert, J.; Bischoff, L.; Aidinis, C.

• Lecture (Conference)
  Conference in Low Temperature Devices, Toscane, Italy, June 1998
• Contribution to external collection
  J. de Phys. IV 8 (1998) Pr3 - 109

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