Ions and electron-irradiation induced deep levels in n-type and p-type 6H-SiC

Gong, M.; Beling, C. D.; Fung, S.; Brauer, G.; Wirth, H. D.; Skorupa, W.; You, Z.-P.

Lecture (Conference)
MRS 1998 Spring Meeting, San Francisco, April 13-17, 1998

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