Formation of Ge-0 and GeOx nanoclusters in Ge+-implanted SiO2/Sithin-film heterostructures under rapid thermal annealing

The results of X-ray photoelectron spectra (XPS valence band and core levels) measurements for Ge+ implanted SiO2/Si heterostructures are presented. These heterostructures have a 30 nm thick Ge+ ion implanted amorphous SiO2 layer on p-type Si. The chemical-state transformation of the host-matrix composition after Ge+ ion implantation and rapid thermal annealing (RTA) are discussed. The XPS-analysis performed allows to conclude the formation of Ge-o and GeOx clusters within the samples under study. It was established, that the annealing time strongly affects the degree of oxidation states of Ge-atoms