Nanofabrication of self-organized periodic ripples by ion beam sputtering
Nanofabrication of self-organized periodic ripples by ion beam sputtering
Iacob, E.; Dell’Anna, R.; Giubertoni, D.; Demenev, E.; Secchi, M.; Böttger, R.; Pepponi, G.
Ion beam sputtering of solid surfaces with ions of low keV energies can produce self-organized periodic ripple patterns of nanometer size on the surface of semiconductors, metals and insulators, therefore looking to be a single-step, cost-effective method to fabricate surface topographies over large areas for various electronic and bio-devices.
To date, a comprehensive theoretical understanding of the ripple development is still missing, and the achievement of the application-specific surface topography still relay on properly tuning different ion-beam parameters, since the experiments have highlighted the dependence of ripple characteristics on them.
The success of technological applications often requires an a-priori defined ratio of ripple height to wavelength. Here we discuss how to obtain regular ripples of height h~10 nm and wavelength λ<=50 nm on silicon surfaces. Xe+ and O+ ions were used to also investigate the role of the surface chemical reactivity.
The results show the development of regular ripples with wavelengths of ~40 nm and heights of ~2 nm superimposed on a less regular periodic topography for O+ bombardment on Si; the Xe+ on Si bombardment produced structures of regularity below the expected values. We discuss the gained insights and the best recipe for the required nano-patterns.
Keywords: ion bombardment; self-organization; silicon; ripples
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
Related publications
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 22284) publication
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Lecture (Conference)
41st Micro and Nano Engineering, 21.-24.09.2015, The Hague, The Netherlands -
Microelectronic Engineering 155(2016), 50-54
DOI: 10.1016/j.mee.2016.02.025
Cited 8 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-22284