Mid-infrared ridge waveguide in MgO:LiNbO3 crystal produced by combination of swift O5+ ion irradiation and precise diamond blade dicing
Mid-infrared ridge waveguide in MgO:LiNbO3 crystal produced by combination of swift O5+ ion irradiation and precise diamond blade dicing
Cheng, Y.; Lv, J.; Akhmadaliev, S.; Zhou, S.; Kong, Y.; Chen, F.
We report on the fabrication of ridge waveguide operating at mid-infrared wavelength in MgO:LiNbO3 crystal by using O5+ ion irradiation and precise diamond blade dicing. The waveguide shows good guiding properties at the wavelength of 4 μm along the TM polarization. Thermal annealing has been implemented to improve the waveguiding performances. The propagation loss of the ridge waveguide has been reduced to be 1.0 dB/cm at 4 μm after annealing at 310 °C. The micro-Raman spectra indicate that the microstructure of the MgO:LiNbO3 crystal has no significant change along the ion track after swift O5+ ion irradiation.
Keywords: Optical waveguide; MgO:LiNbO3 crystal; Ion irradiation; Diamond blade dicing; Mid-infrared waveguides
Involved research facilities
- Ion Beam Center DOI: 10.17815/jlsrf-3-159
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