Nanopatterning of thin CoSi₂ layers by local oxidation

Nanopatterning of thin CoSi₂ layers by local oxidation

Kappius, L.; Antons, A.; Dolle, M.; Trinkaus, H.; Mesters, S.; Bochem, H.-P.; Mantl, S.; Heinig, K.-H.

• Lecture (Conference)
  Spring Meeting, San Francisco, CA, USA, April 13-17, 1998

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