Distribution of gettering centres at a buried amorphous layer in Si

Distribution of gettering centres at a buried amorphous layer in Si

Kögler, R.; Eichhorn, F.; Mücklich, A.; Skorupa, W.; Danilin, A.

• Lecture (Conference)
  11th Int. Conf. on Ion Beam Modification of Materials, Amsterdam,The Netherlands, Aug. 31 - Sept. 4, 1998

Permalink: https://www.hzdr.de/publications/Publ-2239