Defect agglomeration in ion implanted silicon away from R_P

Defect agglomeration in ion implanted silicon away from R_P

Kögler, R.; Yankov, R. A.; Skorupa, W.

• Lecture (Conference)
  XIIth Int. Conf. Ion Implantation Technology (IIT´98), Kyoto, Japan, June 22-26, 1998

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