Correlation of electrical and microstructural properties after high dose aluminium implantation into 6H-SiC

Correlation of electrical and microstructural properties after high dose aluminium implantation into 6H-SiC

Panknin, D.; Wirth, H.; Mücklich, A.; Skorupa, W.

• Lecture (Conference)
  ECSCRM '98 (2nd European Conf. on Silicon Carbide and Related Materials), Montpellier, Sept. 2 - 4, 1998

Permalink: https://www.hzdr.de/publications/Publ-2262