Beta-SiC on SiO₂ formed by ion implantation and bonding for micromechanical applications

Beta-SiC on SiO₂ formed by ion implantation and bonding for micromechanical applications

Serre, C.; Romano-Rodriguez, A.; Perez-Rodriguez, A.; Morante, J. R.; Fonseca, L.; Acero, M. C.; Kögler, R.; Skorupa, W.

• Lecture (Conference)
  E-MRS'98, Strasbourg, France, June 16 - 19, 1998

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