Wave-ordered nanostructures formed on silicon-on-insulator wafers by means of reactive ion beams

Wave-ordered nanostructures formed on silicon-on-insulator wafers by means of reactive ion beams

Smirnov, V. K.; Kibalov, D. S.; Krivlevich, S. A.; Lepshin, P. A.; Potapov, E. V.; Ynakov, R. A.; Skorupa, W.; Danilin, A. B.; Makarov, V. V.

• Lecture (Conference)
  E-MRS'98, Strasbourg, France, June 16 - 19, 1998

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