Room temperature visible photoluminescence from Ar⁺- and Ge⁺-implanted Si₃N₄- and SiO_xN_y-films

Room temperature visible photoluminescence from Ar⁺- and Ge⁺-implanted Si₃N₄- and SiO_xN_y-films

Tyschenko, I. E.; Kachurin, G. A.; Rebohle, L.; Skorupa, W.

• Lecture (Conference)
  E-MRS´98, Strasbourg, June 16-19, 1998

Permalink: https://www.hzdr.de/publications/Publ-2290