Similarity of energetic depositions of cubic boron nitride and titanium nitride thin films
Similarity of energetic depositions of cubic boron nitride and titanium nitride thin films
Wang, X.; Kolitsch, A.; Zhao, J. P.; Möller, W.
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Lecture (Conference)
MRS Fall Meeting 1998, Boston, USA, Nov. 30 - Dec.4, 1998
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