Stabilisation of the 3C-SiC/SOI system by an intermediate Si₃N₄ layer

Stabilisation of the 3C-SiC/SOI system by an intermediate Si₃N₄ layer

Zappe, S.; Obermeier, E.; Stoemenos, J.; Möller, H.; Krötz, G.; Wirth, H.; Skorupa, W.

• Lecture (Conference)
  ECSCRM '98 (2nd European Conf. on Silicon Carbide and Related Materials), Montpellier, Sept. 2 - 4, 1998

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