Overpressurized bubbles versus voids in helium implanted and annealed silicon

Overpressurized bubbles versus voids in helium implanted and annealed silicon

Fichtner, P. F. P.; Kaschny, J. R.; Yankov, R. A.; Mücklich, A.; Kreißig, U.; Skorupa, W.

• Appl.Phys.Lett. 70 (1997) 732

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