Formation and characterisation of Si/SiO₂ multilayer structures by oxygen implantation into silicon

Formation and characterisation of Si/SiO₂ multilayer structures by oxygen implantation into silicon

Hatzopoulos, N.; Siapkas, D. I.; Hemment, P. L. F.; Skorupa, W.

• J. Appl. Phys. 80 (1996) 4960

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