Application of the ECR slot antenna plasma source for ion implantation

Application of the ECR slot antenna plasma source for ion implantation

Korzec, D.; Raiko, V.; Engemann, J.; Günzel, R.; Brutscher, J.; Möller, W.

• Surf. Coat. Technol. 93 (1997) 217

Permalink: https://www.hzdr.de/publications/Publ-2327