TEM characterization of carbon ion implantation into epitaxial Si1-xGex
TEM characterization of carbon ion implantation into epitaxial Si1-xGex
Romano-Rodriguez, A.; Perez-Rodriguez, A.; Serre, C.; Calvo-Barrio, L.; Bachrouri, A.; Gonzalez-Varona, O.; Morante, J. R.; Kögler, R.; Skorupa, W.
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Contribution to external collection
Inst. Phys. Conf. Ser. 157 (1997) 419 -
Lecture (Conference)
Int. Conf. on Microscopy of Semiconducting Materials, Oxford, England, April 1997
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