Process simulation of sub-µm pattern formation by local oxidation of CoSi₂/Si heterostructures

Process simulation of sub-µm pattern formation by local oxidation of CoSi₂/Si heterostructures

Antons, A.; Heinig, K.-H.; Mantl, S.

• Lecture (Conference)
  Int. Workshop on Challenges in Predictive Process Simulation (ChiPPS '97), Wandlitz, Germany, Aug. 17 - 20, 1997

Permalink: https://www.hzdr.de/publications/Publ-2364