Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA
Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA
Behrisch, R.; Grigull, S.; Kreißig, U.; Grötzschel, R.
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Lecture (Conference)
13th Int. Conf. on Ion Beam Analysis (IBA-13), Lisboa, Portugal, Aug. 1997
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