Diffusion behaviour, outgasing and absorption of nitrogen during plasma immersion ion implantation of stainless steel

Diffusion behaviour, outgasing and absorption of nitrogen during plasma immersion ion implantation of stainless steel

Günzel, R.; Möller, W.; Parascandola, S.; Richter, E.

• Lecture (Conference)
  AEPSE `97, Seoul, Korea, Oct. 5-9, 1997

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