Predictive simulations of high-dose ion implantation

Heinig, K.-H.; Strobel, M.; Palard, M.; Schmidt, B.; Grötzschel, R.; Markwitz, A.

Lecture (Conference)
Int. Workshop on Challenges in Predictive Process Simulation (ChiPPS '97), Wandlitz, Germany, Aug. 17 - 20, 1997

Permalink: https://www.hzdr.de/publications/Publ-2399