Helium induced cavities in silicon: their formation, microstructure and gettering ability

Helium induced cavities in silicon: their formation, microstructure and gettering ability

Kaschny, J. R.; Mücklich, A.; Kreißig, U.; Yankov, R. A.; Kögler, R.; Skorupa, W.; Fichtner, P. F. P.; Danilin, A. B.

• Lecture (Conference)
  MRS Spring Meeting, San Francisco, CA, USA, March 31 - April 4, 1997
• Contribution to external collection
  MRS Conf. Proc. 469 (1997) 321

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